A new machine for the automatic position-dependent orientation measurement of AT-cut quartz wafers

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2001, Pages 390-392

  Bradaczek, H A ^a   Bradaczek, H ^a   Pianowski, H ^a   Kononovich, A V ^a   Hildebrandt, G ^a  

^a EFG International   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; LASER BEAM EFFECTS; QUARTZ; REFLECTION; SURFACE TOPOGRAPHY;

CUTTING ANGLE MEASUREMENTS;

X RAY APPARATUS;

EID: 0035168932     PISSN: 01616404     EISSN: None     Source Type: Journal    
DOI: 10.1109/FREQ.2001.956255     Document Type: Article

References (3)

1. Novel use of a commercial goniometer for sorting round quartz blanks
2. Improved Ω-Scan for separate measurement of true AT-cutting angles and X-miscutting angles for round quartz blanks
3. Optical surface scan by laser device, an improvement in the cutting angle determination of round quartz blanks