Cu gettering in Si cavities observed by positron annihilation Doppler broadening

Materials Research Society Symposium - Proceedings

Volumn 647, Issue , 2001, Pages

  Schut, H ^a   Van Veen, A ^a   Eijt, S W H ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COPPER; CRYSTAL DEFECTS; DIFFUSION IN SOLIDS; ION IMPLANTATION;

DOPPLER BROADENING PARAMETERS; POSITRON ANNIHILATION DOPPLER BROADENING; POSITRON BEAM ANNIHILATION;

SEMICONDUCTING SILICON;

EID: 0035162614     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)