Double-gate SOI MOSFET fabrication from bulk silicon wafer

IEEE International SOI Conference

Volumn , Issue , 2001, Pages 93-94

  Lin, X ^a   Feng, C ^a   Zhang, S ^a   Ho, W H ^a   Chan, M ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; GATES (TRANSISTOR); SEMICONDUCTING FILMS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

DOUBLE-GATE DEVICES;

MOSFET DEVICES;

EID: 0035159032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Wang, J.IEEE Transactions on Electron Devices
2. Chen, J.; HProceedings of 2000 International SOI Conferences