Partial trench isolated body-tied (PTIBT) structure for SOI applications

IEEE International SOI Conference

Volumn , Issue , 2001, Pages 71-72

  Min, B W ^a   Dakshina Murthy, S ^a   Mendicino, M ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRODES; ETCHING; GATES (TRANSISTOR); MASKS; OXIDATION; PHOTOLITHOGRAPHY; SEMICONDUCTING FILMS;

BODY-TIED TRANSISTOR STRUCTURES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0035158804     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)