FDTD analysis of wire antenna used for process plasma

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

Volumn 3, Issue , 2001, Pages 561-564

  Sato, Hiroyasu ^a   Tamashiro, Katsuaki ^a   Sawaya, Kunio ^a   Takagi, Tomoko ^b   Ueda, Masashi ^b   Watabe, Yoshimi ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b ANELVA Co ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA FEEDERS; FINITE DIFFERENCE METHOD; IONS; PLASMA SHEATHS; PLASMAS; THIN FILMS; TIME DOMAIN ANALYSIS;

WIRE ANTENNAS;

ANTENNAS;

EID: 0035156936     PISSN: 15223965     EISSN: None     Source Type: Journal    
DOI: 10.1109/APS.2001.960159     Document Type: Article

References (4)

1. 3-Dimmensional dispersive and anisotropic PML absorbing boundary condition
2. FDTD analysis of dipole antenna in anisotropic plasma