Mass sensitivity of Love-mode acoustic sensors incorporating silicon dioxide and silicon-oxy-fluoride guiding layers

Sensors and Actuators, A: Physical

Volumn 88, Issue 1, 2001, Pages 20-28

  Harding, Geoffrey L ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INSERTION LOSSES; OPTICAL MULTILAYERS; POLYMETHYL METHACRYLATES; SENSITIVITY ANALYSIS; SHEAR WAVES; SILICON SENSORS;

ACOUSTIC SENSORS; GUIDING-LAYER MATERIALS; MASS SENSITIVITY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0035124646     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00491-X     Document Type: Article

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