Transient analysis of carrier gas saturation in liquid source vapor generators

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 1, 2001, Pages 329-344

  Mayer, Bruce ^a  

^a Silicon Valley Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUBBLE CHAMBERS; DENSITY OF LIQUIDS; DIFFUSION; EVAPORATION; GAS GENERATORS; REYNOLDS NUMBER; SATURATION (MATERIALS COMPOSITION); SURFACE TENSION; VISCOSITY OF LIQUIDS;

CARRIER GAS SATURATION; CHEMICAL VAPOR GENERATORS; HUMIDIFICATION;

VAPORS;

EID: 0035104983     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1322646     Document Type: Article

References (2)

1. J. F. Loan and J. J. Sullivan, Semicond. Int. 18, 239 (1995).
2. H. A. Kuntz, Western Electric Tech. Dig. 33, 37 (1974).