Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 1, 2001, Pages 108-117

  Gnaser, H ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHARACTERIZATION; MASS SPECTROMETRY; MATHEMATICAL MODELS; OPTIMIZATION; POISSON EQUATION;

ELECTRON DENSITY DISTRIBUTION; ELECTRON GAS SECONDARY NEUTRAL MASS SPECTROMETRY;

PLASMAS;

EID: 0035104554     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1329117     Document Type: Article

References (2)

1. C. H. Becker, S. G. MacKay, and D. G. Welkie, J. Vac. Sci. Technol. B 10, 380 (1992).
2. H. F. Arlinghaus, M. T. Spaar, N. Thonnard, A. W. McMahon, H. Shichi, and P. H. Holloway, J. Vac. Sci. Technol. A 11, 2317 (1993).