Development of a real-time jump-ratio imaging system equipped with a STEM

Journal of Electron Microscopy

Volumn 50, Issue 1, 2001, Pages 15-21

  Kaji, K ^a   Ueda, K ^a   Aoyama, T ^a   Taya, S ^a   Tanaka, H ^a   Isakozawa, S ^a  

^a HITACHI LTD   (Japan)

Author keywords

EELS; Elemental map; Jump ratio imaging; Semiconductors; STEM

Indexed keywords

ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; IMAGING SYSTEMS; TRANSMISSION ELECTRON MICROSCOPY;

DUAL-DETECTORS; ELECTRON-BEAM; ELEMENTAL MAPS; ENERGY FILTER; JUMP RATIO; JUMP-RATIO IMAGING; RATIO IMAGES; REAL- TIME; SCANNING TRANSMISSION ELECTRON MICROSCOPES; WINDOW ENERGIES;

ELECTRON BEAMS;

EID: 0035079919     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.1.15     Document Type: Article

References (15)

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6. Energy filtered 'conventional' transmission imaging with a magnetic sector spectrometer
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