High repetition rate 157 nm mini-excimer-lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4184, Issue , 2001, Pages 330-333

  Görtler, Andreas ^a   Strowitzki, Claus ^a   Geiger, Stephan ^a  

^a TUI   (Germany)

Author keywords

157 nm; Excimer laser; F2 laser; Mini excimer laser; VUV

Indexed keywords

CERMETS; CHEMICAL LASERS; ELECTRODES; LASER RESONATORS; ULTRAVIOLET RADIATION;

MINI-EXCIMER-LASERS;

EXCIMER LASERS;

EID: 0035065601     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.414083     Document Type: Article

References (2)