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Volumn 4157, Issue , 2001, Pages 113-118

Industrial aspects of Nd-YAG laser microprocessing

Author keywords

Lasers; Medical stent and microprocessing; Metal mask; Polymer stencil; Precision cutting

Indexed keywords

INFRARED RADIATION; LASER ABLATION; LASER BEAM CUTTING; LASER BEAM WELDING; MEDICAL APPLICATIONS; MICROELECTRONICS; SEMICONDUCTOR DEVICE MANUFACTURE; THERMOANALYSIS; ULTRAVIOLET RADIATION;

EID: 0035065189     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.413743     Document Type: Conference Paper
Times cited : (3)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.