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Volumn 4157, Issue , 2001, Pages 113-118
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Industrial aspects of Nd-YAG laser microprocessing
a
a
Laser X Co Ltd
(Japan)
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Author keywords
Lasers; Medical stent and microprocessing; Metal mask; Polymer stencil; Precision cutting
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Indexed keywords
INFRARED RADIATION;
LASER ABLATION;
LASER BEAM CUTTING;
LASER BEAM WELDING;
MEDICAL APPLICATIONS;
MICROELECTRONICS;
SEMICONDUCTOR DEVICE MANUFACTURE;
THERMOANALYSIS;
ULTRAVIOLET RADIATION;
LASER MICROPROCESSING;
POLYMER STENCILS;
NEODYMIUM LASERS;
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EID: 0035065189
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.413743 Document Type: Conference Paper |
Times cited : (3)
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References (7)
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