Microfabricated silicon dioxide cantilever with subwavelength aperture

Journal of Microscopy

Volumn 202, Issue 1, 2001, Pages 12-15

  Mitsuoka, Y ^a,b   Niwa, T ^a   Ichihara, S ^a   Kato, K ^a   Muramatsu, H ^a   Nakajima, K ^a   Shikida, M ^a   Sato, K ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Aperture; Cantilever; Focused ion beam; Microfabrication; Scanning near field optical microscopy; SiO2

Indexed keywords

BATCH DATA PROCESSING; FOCUSED ION BEAMS; INCIDENT LIGHT; MICROFABRICATION; NANOCANTILEVERS; OPTICAL FIBERS; PROBES; SILICON OXIDES; THROUGHPUT;

APERTURE; CANTILEVER; FOCUSED IONS BEAMS; MICRO-CANTILEVERS; MICRO-FABRICATION; MICROFABRICATED; MICROFABRICATED SILICON DIOXIDE; OPTICAL THROUGHPUT; SCANNING NEAR-FIELD OPTICAL MICROSCOPY; SUBWAVELENGTH APERTURES;

SILICA;

SILICON DIOXIDE;

CONFERENCE PAPER; FREQUENCY ANALYSIS; LIGHT; MOLECULAR DYNAMICS; OPTICS; PRIORITY JOURNAL; REPRODUCIBILITY; SCANNING NEAR FIELD OPTICAL MICROSCOPY;

EID: 0035060418     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.2001.00867.x     Document Type: Conference Paper

References (7)

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7. Novel scanning near-field optical microscopy/atomic force microscope probes by combined micromachining and electron-beam nanolithography