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Volumn 40, Issue 1, 2001, Pages 76-80
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Subnanometer digital positioning of large bodies by Fabry-Pérot interferometry
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Author keywords
Digital control; Distance stabilization; Fabry P rot cavity; Interferometry; Piezoelectric translator; Tip tilt motion
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Indexed keywords
COMPUTER SIMULATION;
ERROR ANALYSIS;
MATHEMATICAL MODELS;
MICROMETERS;
PIEZOELECTRIC DEVICES;
PIEZOELECTRIC TRANSLATORS;
SUBNANOMETER DIGITAL POSITIONING;
FABRY-PEROT INTERFEROMETERS;
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EID: 0035059771
PISSN: 00913286
EISSN: None
Source Type: Journal
DOI: 10.1117/1.1332773 Document Type: Article |
Times cited : (8)
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References (5)
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