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Volumn 40, Issue 1, 2001, Pages 76-80

Subnanometer digital positioning of large bodies by Fabry-Pérot interferometry

Author keywords

Digital control; Distance stabilization; Fabry P rot cavity; Interferometry; Piezoelectric translator; Tip tilt motion

Indexed keywords

COMPUTER SIMULATION; ERROR ANALYSIS; MATHEMATICAL MODELS; MICROMETERS; PIEZOELECTRIC DEVICES;

EID: 0035059771     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1332773     Document Type: Article
Times cited : (8)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.