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Volumn 27, Issue 4, 2001, Pages 385-389
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Determination of thin film hardness for a film/substrate system
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Author keywords
A. Films; B. Fibres; C. Hardness; E. Substrates
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Indexed keywords
CRYSTAL ORIENTATION;
HARDNESS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON;
SUBSTRATES;
THIN FILMS;
TITANIUM CARBIDE;
INDENTATION SIZE EFFECTS (ISE);
PROTECTIVE COATINGS;
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EID: 0035057770
PISSN: 02728842
EISSN: None
Source Type: Journal
DOI: 10.1016/S0272-8842(00)00092-4 Document Type: Article |
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Times cited : (9)
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References (12)
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