Effective data compaction algorithm for vector scan EB writing system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4186, Issue , 2001, Pages 589-596

  Ueki, S ^a   Ashida, I ^a   Kawahira, H ^a  

^a SONY CORPORATION   (Japan)

Author keywords

Array search; Cell search; Data compaction; Mask data

Indexed keywords

ALGORITHMS; DATA COMPRESSION; DATA STRUCTURES; DYNAMIC RANDOM ACCESS STORAGE; ELECTRON BEAM LITHOGRAPHY;

ARRAY SEARCH; DATA COMPACTION ALGORITHMS; VECTOR SCAN ELECTRON BEAM WRITING SYSTEMS;

MASKS;

EID: 0035047403     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.410740     Document Type: Conference Paper

References (5)

1. Geometrical library recognition for mask data compression
2. Fast chip level OPC method on mask database
3. A new mask data processing system for ULSI fabrication