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Volumn 25, Issue 3, 2001, Pages 215-222

Optical transmission measurements on glow-discharge amorphous silicon nitride films

Author keywords

Hydrogenated amorphous silicon nitride; Optical transmission; Refractive index; Swanepoel method

Indexed keywords

GLOW DISCHARGES; LIGHT ABSORPTION; LIGHT TRANSMISSION; OPTICAL VARIABLES MEASUREMENT; REFRACTIVE INDEX; SILICON NITRIDE; THIN FILMS;

EID: 0035041621     PISSN: 13000101     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (21)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.