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Volumn 32, Issue 1-4, 2001, Pages 63-72
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Finite element simulations of interdigital electrode structures on high permittivity thin films
a
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Author keywords
Finite element simulation; High k dielectric thin films; Interdigital electrode structures; Thin film capacitance
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Indexed keywords
BARIUM TITANATE;
COMPOSITION EFFECTS;
COMPUTER SIMULATION;
DIELECTRIC PROPERTIES OF SOLIDS;
ELECTRIC FIELD EFFECTS;
ELECTRIC POTENTIAL;
FINITE ELEMENT METHOD;
PERMITTIVITY;
STRONTIUM COMPOUNDS;
SUBSTRATES;
FINITE ELEMENT SIMULATIONS;
INTERDIGITAL ELECTRODE STRUCTURES;
THIN FILM CAPACITANCE;
THIN FILMS;
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EID: 0035036780
PISSN: 10584587
EISSN: None
Source Type: Journal
DOI: 10.1080/10584580108215678 Document Type: Conference Paper |
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Times cited : (4)
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References (5)
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