A closer "look" at modern gate oxides

Materials Research Society Symposium - Proceedings

Volumn 611, Issue , 2001, Pages

  Baumann, F H ^a   Chang, C P ^a   Grazul, J L ^a   Kamgar, A ^a   Liu, C T ^a   Muller, D A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DIELECTRIC MATERIALS; HIGH RESOLUTION ELECTRON MICROSCOPY; POLYSILICON; SEMICONDUCTOR INSULATOR BOUNDARIES; SILICA;

GATE OXIDES;

GATES (TRANSISTOR);

EID: 0035035871     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)