Optically-driven actuator using photo-induced phase-transition material

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 256-259

  Ikehara, T ^a   Tanaka, M ^a   Shimada, S ^a   Matsuda, H ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTO-INDUCED PHASE TRANSITIONS (PIPT) MATERIALS;

BENDING (DEFORMATION); COMPOSITE MICROMECHANICS; CRYSTALS; IRRADIATION; OPTICAL SENSORS; PHASE TRANSITIONS; PIEZOELECTRIC MATERIALS; STRAIN; THERMAL EXPANSION;

MICROACTUATORS;

EID: 0035013826     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)