Selective drive of electrostatic actuators using remote inductive powering

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 574-577

  Takeuchi, S ^a   Futai, N ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; NATURAL FREQUENCIES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TRANSMITTERS;

ELECTROSTATIC ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 0035010316     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)