In-line pressure monitoring for microfluidic devices using a deformable diffraction grating

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 174-177

  Hosokawa, K ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FIBER OPTIC SENSORS; FLOW INTERACTIONS; MONITORING; PRESSURE EFFECTS; SILICONES;

MICROFLUIDIC DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035005446     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)