Realization and actuation of continuous-membrane by an array of 3D self-assembling micro-mirrors for adaptive optics

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 329-332

  Quevy, E ^a   Buchaillot, L ^a   Collard, D ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MEMBRANES; MICROACTUATORS; MICROMACHINING; MIRRORS; THIN FILMS;

SELF-ASSEMBLING MICRO-MIRRORS;

ADAPTIVE OPTICS;

EID: 0034999167     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)