"SAMs meet MEMS": Surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 106-109

  Kim, B J ^a   Kim, G M ^a   Liebau, M ^a   Huskens, J ^a   Reinhoudt, D N ^a   Brugger, J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ETCHING; FABRICATION; MICROMACHINING; MICROSTRUCTURE; MONOLAYERS; NEAR FIELD SCANNING OPTICAL MICROSCOPY;

SELF-ASSEMBLED MONOLAYERS (SAM);

MICROELECTROMECHANICAL DEVICES;

EID: 0034996177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)