Calculation of the optical quantities characterizing inhomogeneous thin films using a new mathematical procedure based on the matrix formalism and Drude approximation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4356, Issue , 2001, Pages 207-212

  Franta, D ^a   Ohlidal I ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Drude approximation; Inhomogeneous thin films; Matrix formalism; Optical quantities

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; ELLIPSOMETRY; MATRIX ALGEBRA; NUMERICAL ANALYSIS; OPTICAL PROPERTIES; REFLECTION; REFRACTIVE INDEX; THICKNESS MEASUREMENT;

DRUDE APPROXIMATION; INHOMEGENEOUS THIN FILMS; MATRIX FORMALISM; OPTICAL QUANTITIES; TRANSMITTANCE;

THIN FILMS;

EID: 0034991215     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.417829     Document Type: Conference Paper

References (8)

1. Light reflection from films of continuously varying refractive index
2. Ellipsometry of thin film systems
3. Exact computation of the reflectance of a surface layer of arbitrary refractive-index profile and an approximate solution of the inverse problem
4. Matrix formalism for imperfect thin films
5. 2 by the combined optical method and atomic force microscopy