Temperature dependence of surface acoustic wave filter on ZnO/LiNbO3

Shinku/Journal of the Vacuum Society of Japan

Volumn 44, Issue 3, 2001, Pages 322-325

  Yamamoto, H ^a   Saiga, N ^a   Nishimori, K ^a  

^a YONAGO NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; LITHIUM NIOBATE; SPUTTER DEPOSITION; TEMPERATURE MEASUREMENT; THICKNESS MEASUREMENT; ZINC OXIDE;

INSERTION LOSS; RADIO FREQUENCY SPUTTERING TECHNIQUES;

THERMAL EFFECTS;

EID: 0034971223     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.44.322     Document Type: Article

References (9)