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Volumn 50, Issue 1, 2001, Pages 109-114

Axiomatic design of machine control system

Author keywords

Axiomatic design; Chemical mechanical polishing; Machine control system

Indexed keywords

ALGORITHMS; CHEMICAL MECHANICAL POLISHING; COMPUTER AIDED ANALYSIS; DECISION MAKING; INFORMATION MANAGEMENT; SYSTEMS ANALYSIS; WAVE FILTERS;

EID: 0034960707     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62083-6     Document Type: Article
Times cited : (27)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.