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Volumn 50, Issue 1, 2001, Pages 109-114
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Axiomatic design of machine control system
a a b |
Author keywords
Axiomatic design; Chemical mechanical polishing; Machine control system
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Indexed keywords
ALGORITHMS;
CHEMICAL MECHANICAL POLISHING;
COMPUTER AIDED ANALYSIS;
DECISION MAKING;
INFORMATION MANAGEMENT;
SYSTEMS ANALYSIS;
WAVE FILTERS;
AXIOMATIC DESIGN (AD);
MACHINE CONTROL SYSTEMS;
CONTROL SYSTEMS;
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EID: 0034960707
PISSN: 00078506
EISSN: None
Source Type: Journal
DOI: 10.1016/S0007-8506(07)62083-6 Document Type: Article |
Times cited : (27)
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References (7)
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