High-resolution elemental mapping of titanium oxide/aluminium oxide multilayer by spectrum-imaging

Journal of Electron Microscopy

Volumn 50, Issue 3, 2001, Pages 141-146

  Kurata, H ^a,b   Kumagai, H ^b   Ozasa, K ^b  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Electron energy loss spectroscopy; Elemental mapping; Multilayer; Scanning transmission electron microscopy; Spectrum imaging

Indexed keywords

ARTICLE;

ALUMINA; AMORPHOUS SILICON; DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAPPING; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; TITANIUM OXIDES;

AMORPHOUS TITANIUM OXIDE; COLLECTION ANGLE; ELECTRON ENERGY-LOSS SPECTROSCOPIES; ELEMENTAL MAPPING; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPIES; HIGH RESOLUTION; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SILICON SUBSTRATES; SPECTRUM IMAGES; SPECTRUM IMAGING;

ALUMINUM OXIDE;

EID: 0034935964     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.3.141     Document Type: Article

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