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Journal of Thermal Analysis and Calorimetry

Volumn 64, Issue 3, 2001, Pages 1171-1182

Volatile β-diketonato complexes of ruthenium, palladium and platinum preparation and thermal characterization

(3) Lashdaf, M a Hatanpaa T b Tiitta, M c

a Volatec Oy (Finland)

b UNIVERSITY OF HELSINKI (Finland)

c Fortum Oil and Gas Oy (Finland)

Author keywords

Atomic layer epitaxy; Catalyst precursor; Chemical vapor deposition; Decomposition; Diketonate; Palladium; Platinum; Reduction; Ruthe nocene; Ruthenium; Sublimation

Indexed keywords

DESORPTION; DIFFERENTIAL SCANNING CALORIMETRY; MASS SPECTROMETRY; MOLECULAR SPECTROSCOPY; PALLADIUM; PLATINUM; PRESSURE EFFECTS; RUTHENIUM; SUBLIMATION; THERMODYNAMIC PROPERTIES; THERMOGRAVIMETRIC ANALYSIS; VOLATILE ORGANIC COMPOUNDS;

ATOMIC LAYER EPITAXY; CATALYST PRECURSOR; FIELD DESORPTION MASS SPECTRA; PALLADIUM TETRAMETHYL HEPTANEDIONE COMPLEX; PLATINUM TETRAMETHYL HEPTANEDIONE COMPLEX; RUTHENIUM TETRAMETHYL HEPTANEDIONE COMPLEX; RUTHENIUM TRIS ACETYLACETONATE; RUTHENOCENE; VOLATILE DIKETONATE COMPLEX;

DIFFERENTIAL THERMAL ANALYSIS;

EID: 0034901506 PISSN: 14182874 EISSN: None Source Type: Journal
DOI: 10.1023/A:1011549130134 Document Type: Article

Times cited : (26)

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