Initial oxidation process on Si(001) studied by high-resolution Rutherford backscattering spectroscopy

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 11, 2001, Pages

  Nakajima, Kaoru ^a   Okazaki, Yasutaka ^a   Kimura, Kenji ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; MOLECULAR DYNAMICS; MOLECULAR INTERACTION; MOLECULAR PHYSICS; OXIDATION; PHASE TRANSITION; SEMICONDUCTOR;

EID: 0034894753     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.113314     Document Type: Article

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