Molecular dynamics simulations of ionized cluster beam deposition: Case of study of aluminum

Computational Materials Science

Volumn 21, Issue 4, 2001, Pages 509-514

  Kang, Jeong Won ^a   Hwang, Ho Jung ^a  

^a Chung Ang University   (South Korea)

Author keywords

Cluster deposition; Correlated collisions; Molecular dynamics simulation

Indexed keywords

ATOMS; COMPUTER SIMULATION; DEPOSITION; ENERGY TRANSFER; IONIZING RADIATION; MOLECULAR DYNAMICS; SUBSTRATES;

IONIZED CLUSTER BEAM DEPOSITION;

ALUMINUM;

EID: 0034880656     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0256(01)00199-9     Document Type: Article

References (10)