Micro-moiré methods - Optical and scanning techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4416, Issue , 2001, Pages 54-57

  Asundi, A ^a   Xie, H ^a   Li, C ^a   Chai Gin Boay, ^a   Oh Kim Eng, ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

AFM scanning moir ; Laser moir interferometry; Method; Micro deformation; Strain

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE DIFFRACTION; INTERFEROMETRY; OPTICAL RESOLVING POWER;

LASER MOIRE INTERFEROMETRY;

SCANNING;

EID: 0034878629     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.426994     Document Type: Conference Paper

References (4)

1. Improvements on moiré techniques for in-plane deformation measurements
2. In-plane deformation measurement using atomic force microscope moiré method
3. Moiré in atomic force microscope