Remotely controllable mobile microrobots acting as nano positioners and intelligent tweezers in scanning electron microscopes (SEMs)

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2001, Pages 3909-3913

  Schmoeckel, F ^a   Worn H ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

Micromanipulation; Microrobots; Scanning electron microscopy

Indexed keywords

ACTUATORS; PIEZOELECTRIC DEVICES; REMOTE CONTROL; SCANNING ELECTRON MICROSCOPY; USER INTERFACES;

INTELLIGENT TWEEZERS;

MOBILE ROBOTS;

EID: 0034873725     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2001.933226     Document Type: Conference Paper

References (7)

1. Hand-eye system in nano manipulation world
2. Stick and slip actuators and parallel architectures dedicated to microrobotics
3. A flexible microrobot-based microassembly station
4. Development and control of piezoelectric actuators for the mobile micromanipulation system
5. Automated microassembly by means of a micromanipulator and external sensors
6. Smart flexible microrobots for SEM applications