Micromechanical DC-DC converter

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 59-62

  Mottonen M ^a   Oja, A ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Micromechanical DC DC converter; Micromechanical resonator

Indexed keywords

APPROXIMATION THEORY; CAPACITORS; COMPUTER SIMULATION; ELECTRIC CONVERTERS; ELECTRIC POTENTIAL; ELECTROSTATICS; MICROMACHINING; REACTIVE ION ETCHING; RESONANT CIRCUITS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TIME DOMAIN ANALYSIS;

MICROMECHANICAL RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034866610     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425376     Document Type: Conference Paper

References (2)