A study on novel ultra-micropositioning mechanism and system with nanometer resolution

Proceedings of the International Symposium on Test and Measurement

Volumn 1, Issue , 2001, Pages 33-36

  Wang, J ^a   Zhou, X ^a  

^a BEIJING UNIVERSITY OF CHEMICAL TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ERROR ANALYSIS; INTERFEROMETERS; LAPLACE TRANSFORMS; PIEZOELECTRICITY; SCANNING TUNNELING MICROSCOPY; STIFFNESS;

PIEZOELECTRIC ERRORS; ULTRA-MICROPOSITIONING SYSTEMS;

ACTUATORS;

EID: 0034863436     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. A spring guided micro-positioner with linearized subnanometer resolution
2. Long-range scanning for scanning tunneling microscopy
3. Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model reference control
4. Improving the linearity of piezoelectric ceramic actuators