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Volumn 4306, Issue , 2001, Pages 196-204

Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona

Author keywords

Astronomy; CCD; Charge coupled Device; Detectors; Silicon; Thin films

Indexed keywords

GATES (TRANSISTOR); IMAGE SENSORS; INTERFEROMETRY; OPTIMIZATION; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUBSTRATES; THIN FILMS;

EID: 0034860051     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.426955     Document Type: Article
Times cited : (5)

References (5)
  • 5
    • 0034467765 scopus 로고    scopus 로고
    • CCD backside coatings optimized for 200-300 nm observations
    • (2000) Proc. SPIE , vol.4139 , pp. 8
    • Lesser, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.