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Volumn 4306, Issue , 2001, Pages 196-204
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Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona
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Author keywords
Astronomy; CCD; Charge coupled Device; Detectors; Silicon; Thin films
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Indexed keywords
GATES (TRANSISTOR);
IMAGE SENSORS;
INTERFEROMETRY;
OPTIMIZATION;
PHOTOLITHOGRAPHY;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SUBSTRATES;
THIN FILMS;
BACK ILLUMINATED SENSORS;
CHARGE COUPLED DEVICES;
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EID: 0034860051
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.426955 Document Type: Article |
Times cited : (5)
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References (5)
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