In situ mass spectrometry during thermal CVD of the tris-acetylacetonates of 3-d transition metals

Journal De Physique. IV : JP

Volumn 11, Issue 3, 2001, Pages

  Semyannikov, P P ^a   Igumenov, I K ^a   Trubin, S V ^a   Asanov, I P ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MASS SPECTROMETRY; MOLECULAR BEAMS; PYROLYSIS; SUBLIMATION; THERMODYNAMIC PROPERTIES;

VOLATILE METAL CHELATES;

TRANSITION METALS;

EID: 0034855041     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:20013125     Document Type: Conference Paper

References (12)