Recent progress of nanotechnologies of thin films for industrial applications

Materials Science and Engineering C

Volumn 15, Issue 1-2, 2001, Pages 231-235

  Taga, Yasunori ^a  

^a Rd Management Section   (Japan)

Author keywords

Film applications; Film morphology; Interface structure; Nonotechnology; Thin films

Indexed keywords

DEPOSITION; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTICAL PROPERTIES; VACUUM;

FINE STRUCTURES;

THIN FILMS;

FILM;

EID: 0034853283     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0928-4931(01)00269-7     Document Type: Article

References (9)