Model library and tool support for MEMS simulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 10-23

  Schwarz, P ^a   Schneider, P ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS   (Germany)

Author keywords

FEM; Generalized networks; Model library; Modelling tools; Multi domain; Order reduction; Parameter optimization; Simulator coupling; System simulation

Indexed keywords

COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER PROGRAMMING LANGUAGES; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SYSTEMS ANALYSIS;

MODEL DESCRIPTION LANGUAGES; MODEL LIBRARIES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034851496     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425295     Document Type: Conference Paper

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