Fundamental studies on the decomposition mechanism of Ti(OC3H7)4 and TiO2 film evolution on Si(100) and Pt(100) surfaces

Journal De Physique. IV : JP

Volumn 11, Issue 3, 2001, Pages

  Cho, S I ^a   Moon, S H ^a   Chung, C H ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; FILMS; MASS SPECTROMETERS; PLATINUM; SILICON; SOL-GELS; SURFACE CHEMISTRY; TEMPERATURE PROGRAMMED DESORPTION;

LIGANDS;

TITANIUM COMPOUNDS;

EID: 0034847654     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)