Continuum model of shot noise and line edge roughness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4404, Issue , 2001, Pages 123-132

  Gallatin, G M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUUM MECHANICS; MATHEMATICAL MODELS; STATISTICAL METHODS; SURFACE ROUGHNESS;

LINE EDGE ROUGHNESS (LER);

SHOT NOISE;

EID: 0034846183     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425198     Document Type: Conference Paper

References (25)

1. Optical lithography modeling
2. General principles of geometrical optics