Spatial filtering effects of the attenuated PSM and assist bar OPC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4404, Issue , 2001, Pages 412-419

  Smith, B W ^a  

^a Rochester Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING TECHNIQUES; MASKS; OPTIMIZATION; PHASE SHIFT;

ATTENUATED PHASE SHIFT MASK (APSM);

LITHOGRAPHY;

EID: 0034844623     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425233     Document Type: Conference Paper

References (0)