Design of a micro Wankel rotary engine for MEMS fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 54-60

  Jiang, Kyle C ^a   Prewett, Philip D ^a   Ward, M C L ^a   Tian, Y ^a   Yang, H ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Energy density; Microactuator; Microengine; Wankel engine

Indexed keywords

COMPUTER AIDED DESIGN; ETCHING; FINITE ELEMENT METHOD; FUELS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SOFTWARE PROTOTYPING; SYNCHRONIZATION; SYSTEMS ANALYSIS;

PLANETARY ROTARY ENGINES;

WANKEL ENGINES;

EID: 0034839449     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425333     Document Type: Article

References (11)

1. Integration of deformable mirror devices with optical fibres and wave guides
2. Fomenting a revolution, in miniature
3. Micro-heat engines, gas turbines, and rocket engines - The MIT micro engine project
4. Cryogenic Automotive Propulsion