SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 55, Issue 1-4, 2001, Pages 65-71

EPR and UV-Raman study of BPSG thin films: Structure and defects

(4) Fanciulli, M a Bonera, E a,b Carollo, E c Zanotti, L c

a LABORATORIO MDM (Italy)

b UNIVERSITY OF LEEDS (United Kingdom)

c STMICROELECTRONICS (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BOROPHOSPHATE GLASS; BOROSILICATE GLASS; CHEMICAL VAPOR DEPOSITION; ELECTRON SPIN RESONANCE SPECTROSCOPY; HOLE TRAPS; IRRADIATION; MOLECULAR VIBRATIONS; OPTICAL CORRELATION; PARAMAGNETISM; RAMAN SPECTROSCOPY; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

BOROPHOSPHOSILICATE GLASS FILMS; PARAMAGNETIC DEFECTS;

AMORPHOUS FILMS;

EID: 0034836760 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(00)00430-5 Document Type: Article

Times cited : (19)

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