A new simple method for fabrication of fine metal patterns

Materials Research Society Symposium - Proceedings

Volumn 636, Issue , 2001, Pages

  Hotta, Y ^a   Asakawa, K ^a   Matake, S ^a   Hiraoka, T ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; HYDROPHILICITY; HYDROPHOBICITY; ION EXCHANGE; PLATING; SUBSTRATES;

METAL PATTERNS;

METALS;

EID: 0034836173     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Materials science of microelectrochemical system (MEMS) devices