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Proceedings of the IEEE Hong Kong Electron Devices Meeting

Volumn , Issue , 2001, Pages 132-139

Dielectric traps in amorphous silicon oxynitride

(2) Wong, H a Gritsenko, V A a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRON TRAPS; MOS DEVICES; SEMICONDUCTOR DEVICE STRUCTURES; SILICON NITRIDE;

DIELECTRIC TRAPS;

AMORPHOUS SILICON;

EID: 0034833644 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.