Empirical strategy for detection and removal of misalignment aberrations in interferometry

Optik (Jena)

Volumn 112, Issue 7, 2001, Pages 304-308

  Dresel, T ^a   Lindlein, N ^a   Schwider, J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Interferometry; Metrology; Micro optic; Optical standards and testing; Optical testing; Phase measurement; Surface measurement

Indexed keywords

INTERFEROMETRY; MICROOPTICS; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; PHASE MEASUREMENT; STANDARDS; SURFACE MEASUREMENT;

MISALIGNMENT ABERRATIONS; OPTICAL STANDARDS;

ABERRATIONS;

EID: 0034830619     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00060     Document Type: Article

References (3)

1. Digital wavefront measuring interferometer for testing optical surfaces and lenses
2. Advanced evaluation techniques in interferometry
3. Twyman-Green interferometer for testing microspheres