Zone model for zinc oxide deposited by combustion chemical vapor deposition

Thin Solid Films

Volumn 384, Issue 2, 2001, Pages 177-184

  Polley, T A ^a,b   Carter, W B ^b  

^a MicroCoating Technologies   (United States)

^b Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; COMBUSTION; COMPOSITION; CRYSTAL MICROSTRUCTURE; DIFFUSION IN SOLIDS; GRAIN SIZE AND SHAPE; SEMICONDUCTING ZINC COMPOUNDS; THERMAL EFFECTS; VAPOR PRESSURE; ZINC OXIDE;

COMBUSTION CHEMICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0034830417     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01819-8     Document Type: Article

References (12)

1. A.T. Hunt, W.B. Carter, J.K. Cochran Jr., Proceedings on Coatings and Substrate Integrity of High Temperature Materials I, sponsored by TMS-AIME, Las Vegas, NV, February 12-16, 1995.
2. A.T. Hunt, J.K. Cochran, W.B. Carter, U.S. patent number 5,652,021, 29 July 1997.
3. A.T. Hunt, W.B. Carter, J.K. Cochran, Jr., Appl. Phys. Lett. 63 (1993) 266.
4. J.M. Hampikian, A.T. Hunt, W.B. Carter, Process Fabric Adv. Mater. III (1994) 345.
5. J.M. Hampikian, M.R. Hendrick, W.B. Carter, Proceedings of Symposium: Fundamental Aspects of High Temperature Corrosion, PV 86-26, 1997, pp. 139-150.
6. D.W. Stollberg, W.B. Carter, J.M. Hampikian, Surf. Coat. Technol. 94-95 (1997) 137.
7. W.B. Carter, G.W. Book, T.A. Polley, D.W. Stollberg, J.M. Hampikian, Thin Solid Films 347 (1999) 25.
8. T.A. Polley, W.B. Carter, D.B. Poker, Thin Solid Films 357 (1999) 132.
9. B.A. Movchan, A.V. Demchishin, Fiz. Met. Mettaloved. 28 (1969) 83.
10. J.A. Thornton, J. Vac. Technol. 11 (1974) 666.
11. W.A. Tiller, The Science of CrystallizationCambridge, New York, NY, 1991, pp. 172-228.
12. D.E. Gray (ed.), American Institute of Physics Handbook, McGraw-Hill, New-York NY, 1972, pp. 9-94.