Carbon effect on the phase structure and the hardness of RF sputtered zirconia films

Thin Solid Films

Volumn 382, Issue 1-2, 2001, Pages 23-29

  Laidani, N ^a   Micheli, V ^a   Anderle, M ^a  

^a ITC IRST   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COMPOSITION EFFECTS; GRAPHITE; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; POLYCARBONATES; RESIDUAL STRESSES; SPUTTER DEPOSITION; THIN FILMS; TUNGSTEN CARBIDE; ZIRCONIA;

PHASE STRUCTURE;

CERAMIC COATINGS;

EID: 0034825546     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01682-5     Document Type: Article

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