Precision motion control system for ultra-precision semiconductor and electon components manufacturing

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2001, Pages 1372-1379

  Tan, K K ^a   Dou, H F ^a   Tang, K Z ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK CONTROL; LINEAR MOTORS; MATHEMATICAL MODELS; MOTION CONTROL; SERVOMOTORS;

ADAPTIVE NOTCH FILTER; DC PERMANENT MAGNET LINEAR MOTOR; ELECTRONIC COMPONENTS MANUFACTURING; PRECISION MOTION CONTROL SYSTEM;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034823083     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. Precision engineering: An evolutionary view
2. Permanent-magnet DC linear motors
3. Determination and correction of quadrature fringe measurement errors in interferometer
4. Geometrical error compensation of precision motion systems using radial basis functions
5. Friction modeling and adaptive compensation using a relay feedback approach
6. An adaptive ripple suppression/compensation apparatus for permanent magnet linear motors
7. Analysis and classical control design of servo system using high order disturbance observer
8. PWM modelling and application to disturbance observer-based precision motion control
9. Adaptive suppression of narrow-band vibrations
10. Monitoring and suppression of vibration in precision machines
11. Monitoring and suppression of vibration in precision machines
12. Geometrical error compensation of precision motion systems using neural networks
13. New interpolation method for quadrature encoder signals