Microlens arrays with integrated thin film power monitors

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2001, Pages 876-879

  Ma, Eugene ^a   Payne, Adam ^a   Nemchuk, Nikolay ^a   Domash, Lawrence ^a   Levine, B Martin ^b   Hrabica, Gerald ^b  

^a Aegis Semiconductor Inc   (United States)

^b Adaptive Optics Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; ARRAYS; INTEGRATED OPTOELECTRONICS; MICROLENSES; PHOTODIODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; THIN FILM DEVICES;

ANTIREFLECTION PROPERTIES; MIROLENS ARRAYS; PASSIVE OPTICAL FUNCTIONS; THIN FILM POWER MONITORS; THIN FILM SENSORS; WAVELENGTH DEPENDENCE;

OPTICAL INTERCONNECTS;

EID: 0034822281     PISSN: 05695503     EISSN: None     Source Type: Journal    
DOI: 10.1109/ECTC.2001.927897     Document Type: Article

References (4)

1. A study of band-gap grading for the end-of-life a-SiGe:H cell efficiency
2. Chap. 7, Miniature and micro-optics
3. Fabricating and testing of monolithic lenslet module